Random residual neural network–based nanoscale positioning measurement
نویسندگان
چکیده
منابع مشابه
Polarimetric interferometer for nanoscale positioning applications.
We propose and demonstrate a displacement control method at the subnanometric scale based on a Michelson interferometer combined with a polarimeter and a phase-locked loop electronic board. Step by step displacements with a step value of 5 nm are presented. A repeatability of 0.47 nm is obtained from back and forth displacements over 1 mum range. We show that a residual ellipticity of less than...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2020
ISSN: 1094-4087
DOI: 10.1364/oe.390231